http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014191298-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-023 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2013-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_84d9f1f50907cdfea6c493745594712a |
| publicationDate | 2014-10-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2014191298-A |
| titleOfInvention | Photosensitive resin composition, method for producing interlayer insulating film, cured film, liquid crystal display device, and organic EL display device |
| abstract | A method for producing an interlayer insulating film capable of further improving resolution is provided. (1) A step of applying a photosensitive resin composition on a substrate, (2) a coated photosensitive resin composition A step of removing the solvent from the product, (3) a step of exposing the photosensitive resin composition from which the solvent has been removed with actinic rays, and (4) a developer containing the exposed photosensitive resin composition as a main component. And (5) a baking step of thermosetting the developed photosensitive resin composition, the photosensitive resin composition comprising (A) (a1) a structural unit having an acid group, and (A2) a polymer having a structural unit having a crosslinkable group, (B) a quinonediazide compound, and (C) a solvent, wherein the structural unit (a2) having a crosslinkable group is an epoxy group, an oxetanyl group, -NH-CH 2 -O-R ( R Containing structural unit containing at least one selected from the group consisting of groups represented by alkyl group) a hydrogen atom or a C number of 1 to 20, a manufacturing method of the interlayer insulating film. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102084433-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180097319-A |
| priorityDate | 2013-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 309.