http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014185363-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ed62b7551998e54b35784cdbbb2778d5 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-481 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F26B3-283 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67115 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-46 |
| filingDate | 2013-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3fbb44306002ee5ea037cc55f7bed0f5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3cd060bc4a3d9ce9aba67e94c46a132b |
| publicationDate | 2014-10-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2014185363-A |
| titleOfInvention | Substrate processing apparatus, processing container, and semiconductor device manufacturing method |
| abstract | PROBLEM TO BE SOLVED: To stabilize a heating condition of a substrate and improve a quality of a film forming process when a thin film is formed on a substrate heated using a heating unit provided outside a processing container. A processing container in which processing is performed on a substrate inside, a heating unit that is provided outside the processing container and heats the substrate in the processing container by radiating heat, and a source gas is supplied into the processing container And a heat absorption layer that saturates the absorption of radiant heat from the heating unit is formed on at least a part of the outer wall of the processing container. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7325350-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190024737-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019044214-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102110045-B1 |
| priorityDate | 2013-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 87.