| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_82cbc291d77c061ac9a216f86ec010a3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e34c3b588751e2c3ca8a8ee24a60db8b |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F04C29-023
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F04C2220-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F04C2230-91
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49236 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F04C25-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F04C18-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F01D5-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F04C27-009 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F04C27-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F04C25-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F04C18-16 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08J7-00 |
| filingDate |
2014-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d060c6956ae6319f481be5fea219bc94
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aa84bda976194076eaffcb1fd4a8ed97
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_392c29d37d35c0ae8f81d09691affbc3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_550b8cceb2fa0ee95ce9d71d304a2001
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d104b47ae80054ee55b233ae4e67dfc4 |
| publicationDate |
2014-09-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2014177630-A |
| titleOfInvention |
Rotating mechanism of gas exhaust pump and manufacturing method thereof, and gas exhaust pump equipped with the rotating mechanism and manufacturing method thereof |
| abstract |
A method for forming a smooth film on a rotary shaft of a screw pump and a free surface of a housing is provided. A member having a film containing perfluoroalkoxyalkane (PFA) represented by Structural Formula 1 on the surface is prepared, and the member is exposed to a temperature atmosphere higher than the melting temperature of PFA to form a free surface region of the film. After melting, the free surface area is solidified by exposure to a temperature lower than the melting temperature of the PFA, and then the portion that becomes the free surface area by exposing it to an atmosphere having a temperature exceeding the melting temperature of the PFA or the melting temperature of the PFA. A method of lowering to a temperature sufficiently lower than the melting temperature of PFA after remelting. [Selection] Figure 1 |
| priorityDate |
2011-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |