| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_294881271413951a95f284b588a68e66 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C2059-023
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C2043-025
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C59-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C43-021 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29D11-0048
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C33-424
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C33-56 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C33-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C59-02 |
| filingDate |
2013-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fe912a6802c969df6c4655cde9dccd21
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_45955f63d250a9f47a3d95ec02cf1c34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_895d31f8d223e83c565c7e1c3d79d4df
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_70f759524797e2a6c387e88ae5c33f14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e4eeaf93b5acbda549b86e82c334efe4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5603c1de3ab8b23e1274d132331323ab |
| publicationDate |
2014-09-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2014168868-A |
| titleOfInvention |
Transfer mold and structure manufacturing method |
| abstract |
A transfer mold having excellent transferability is provided. A transfer mold includes a main body having an uneven surface, a first layer containing an inorganic material provided on the uneven surface, and a second layer containing fluorine provided on the surface of the first layer. With. The average value of the hardness of the uneven surface provided with the first layer and the second layer is 30 Hv or more. As the inorganic material, an oxide semiconductor or a dielectric is preferably used, and as the fluorine compound, silane coupling having a perfluoropolyether group or the like at the terminal is preferably used. [Selection] Figure 6 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7190249-B2 |
| priorityDate |
2013-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |