| abstract |
A piezoelectric thin film element having high adhesion between a lower electrode and a diaphragm and having a stable driving force over time is provided. In addition, a piezoelectric actuator, a droplet discharge head, and a droplet discharge device including the piezoelectric thin film element are provided. A diaphragm formed on a substrate, a lower electrode formed on the diaphragm, a piezoelectric thin film formed on the lower electrode, and an upper electrode formed on the piezoelectric thin film The diaphragm includes a film having a compressive stress and a silicon nitride film, the lower electrode includes a layer having a (111) orientation, and a metal oxide film formed on the silicon nitride film is an outermost layer. A piezoelectric thin film element comprising a multilayer structure. [Selection] Figure 1 |