http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014150324-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_76f595ac54dedcd4462857c633360f85 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-19 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-215 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H3-02 |
| filingDate | 2013-01-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_489611d407364a5ce685de1229694164 |
| publicationDate | 2014-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2014150324-A |
| titleOfInvention | Quartz crystal resonator and manufacturing method thereof |
| abstract | PROBLEM TO BE SOLVED: To improve handling of a crystal wafer in which a crystal piece and an outer frame are integrally formed in a wafer level package technology. An intermediate wafer 10 on which corrosion-resistant films 141 and 142 are formed, an upper wafer 20 on which corrosion-resistant films 241 and 242 are formed, and a lower wafer 30 on which a corrosion-resistant film 34 is formed are bonded in respective thickness directions. A crystal piece and an outer frame are formed by performing wet etching on the bonded intermediate wafer 10, upper wafer 20, and lower wafer 30. [Selection] Figure 1 |
| priorityDate | 2013-01-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 18.