| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1af8df51ce24ca931ae718fb747f6aa0 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-182
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-006 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3174
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0274 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-305
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate |
2013-09-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e9f9dd858fa619f5cd500e7f859df292 |
| publicationDate |
2014-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2014140009-A |
| titleOfInvention |
Drawing apparatus and article manufacturing method |
| abstract |
A drawing apparatus is provided which is advantageous for removing contaminants deposited on a member having an opening through which a charged particle beam passes. A drawing apparatus for drawing on a substrate with a charged particle beam, comprising: a first member including an opening through which the charged particle beam passes; and a first space and a second space partitioned by the first member. A first supply part that supplies a first gas containing unsaturated hydrocarbons to the first space, and a second supply part that supplies a second gas containing ozone to the second space, There is provided a drawing apparatus having a removal mechanism for removing contaminants deposited on the first member by active species generated by a reaction between a first gas and the second gas. [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7065027-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180132884-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019507951-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10632509-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102501182-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016066786-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11738376-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10987705-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I765884-B |
| priorityDate |
2012-12-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |