| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_cebc9740ef706cde29e885504f274ffa |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B9-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C41-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B1-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C41-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C59-02 |
| filingDate |
2013-01-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_55b7c44eb6397669046d488a64e99b0d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_83a7d9ffc1c9b5e884e12b91d939f601 |
| publicationDate |
2014-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2014138992-A |
| titleOfInvention |
Article having fine concavo-convex structure on surface and method for producing the same |
| abstract |
An object of the present invention is to provide an article having a fine concavo-convex structure made of silica on its surface, and a method for producing them easily at low cost. SOLUTION: (1) A step of applying a silica precursor on a mold having a fine concavo-convex structure on its surface to form a coating layer; (2) dry etching treatment of the coating layer using a gas containing oxygen. The manufacturing method of the articles | goods which have the fine concavo-convex structure which consists of a silica including the process of changing this application layer into a silica layer, and the process of releasing the said silica layer from the said mold. The gas containing oxygen preferably does not contain a fluorine-based gas. [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022168457-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11312857-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021182049-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110325594-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110325594-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2018164194-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7055494-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018164194-A1 |
| priorityDate |
2013-01-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |