http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014138086-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a665d61597c2731ab4130971ee397dc9 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 |
| filingDate | 2013-01-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c3672b16be9e01dfcbc6e20dbb5a76f5 |
| publicationDate | 2014-07-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2014138086-A |
| titleOfInvention | Polishing method |
| abstract | A method for reducing an organic compound derived from a polishing composition remaining on the surface of a polishing object is provided. A polishing step (1) for polishing an object to be polished using a polishing composition containing an organic compound component containing at least one of a surfactant or an anticorrosive and an abrasive, and the polishing step (1) And polishing step (2) for polishing the object to be polished while supplying water instead of the polishing composition, and the polishing method remaining on the surface to be polished of the object to be polished Provided is a polishing method for reducing defects derived from organic compound components. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11646209-B2 |
| priorityDate | 2013-01-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 188.