| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a665d61597c2731ab4130971ee397dc9 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1436
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-044
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate |
2012-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9c7df139bb8b8a4400ab8cda5a63fb4a |
| publicationDate |
2014-07-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2014130944-A |
| titleOfInvention |
Polishing composition |
| abstract |
Provided is a polishing composition capable of suppressing scratches on the surface of a metal substrate while suppressing dishing of the metal substrate which is an object to be polished. A surface modifying group having at one end a functional group that suppresses dissolution of the metal substrate by adsorbing to the metal substrate, and metal oxide particles on which the surface modifying group is immobilized. A polishing composition comprising functional abrasive grains and water. [Selection figure] None |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I745421-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018203601-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7329035-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2016038995-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016056254-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018107294-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-6958774-B1 |
| priorityDate |
2012-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |