http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014124883-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73ebc284a55d5daf0e209d6186c9e65c |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-055 |
| filingDate | 2012-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c62f8c9430d7e2382f4fe9ae370505c4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b9e565f8f05efdc3c512eef9d75721f0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fc02f757e90f12f5188d9d01be7e1a0a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c92168bbb73a8df45e6a209df205d96e |
| publicationDate | 2014-07-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2014124883-A |
| titleOfInvention | Liquid ejecting head and liquid ejecting apparatus |
| abstract | Provided are a liquid ejecting head and a liquid ejecting apparatus capable of suppressing a silicon substrate from being eroded by a liquid and suppressing liquid leakage, liquid droplet ejection failure, and separation of stacked substrates. The nozzle plate includes at least a nozzle plate provided with a nozzle opening for discharging a liquid and a flow path forming substrate provided with a pressure generating chamber communicating with the nozzle opening. 20 is formed of a silicon substrate, and at least the flow path forming substrate 10 and the nozzle plate 20 are bonded to films 201 and 203 including at least one of a hafnium oxide film and a zirconium oxide film formed by atomic layer deposition. After being provided on the entire surface including the surface, it is joined. [Selection] Figure 3 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10850514-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020055225-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10913275-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7172398-B2 |
| priorityDate | 2012-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 30.