| abstract |
A dynamic focus shift optical coherence tomography microscope using optical coherence tomography, which is high resolution, high speed and inexpensive. Laser light whose wavelength is swept is incident on a single mode fiber. The incident light is divided by the fiber coupler 102, one of which is directed to the device under test 120, and the other is reflected by the mirror 108 as reference light. The light reflected in the DUT 120 is recombined with the single mode fiber 101 via the lens 105, the variable focus lens 104, and the lens 103. At this time, the incident position of the single mode fiber and the focal point in the object to be measured are in a confocal relationship, and it is the reflection from the focal position that recombines with the single mode fiber 101 in the reflected light from the object to be measured 120 Only light. The focal position can be changed using the variable focus lens 104, and the reflectance distribution in the depth direction can be obtained. [Selection] Figure 1 |