| abstract |
An object of the present invention is to control the distance between a conductor substrate and a needle electrode with high accuracy to generate plasma efficiently, reduce the generation amount of ozone, and efficiently bring air into contact with plasma. An insulator layer having a fluid circulation hole, a first electrode having a first through hole provided on one surface of the insulator layer and communicating with the fluid circulation hole, and an insulator. The second electrode 3 is provided on the other surface 1 b of the layer 2, and the tip 31 a has a protrusion 31 positioned at the opening edge 11 a of the fluid circulation hole 11. [Selection] Figure 1 |