http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014084240-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9df90d7822cc480ce12c480f4089e229 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6dd74b20fbf2e0ebf10c7bfad4f6c8c5 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B23-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-38 |
| filingDate | 2012-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_886d49320e256640a270c9e6789837e8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_baff975d4a96b6eb0253bec69b49ea0e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_43cae2c10022e25c527291dae84d32c8 |
| publicationDate | 2014-05-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2014084240-A |
| titleOfInvention | Aluminum nitride single crystal manufacturing equipment |
| abstract | An apparatus for producing an aluminum nitride single crystal capable of preventing deformation and breakage of a seed substrate due to thermal stress by suppressing adhesion between the seed substrate and a lid. A holding member 15 has a peripheral edge extending toward an inner surface 19a of a lid body 19, and is fixed to the lid body 19 at the tip thereof. Due to the shape of the holding member 15, the separation distance between the other surface (back surface) 14 b opposite to the crystal growth surface 14 a of the seed substrate placed on the holding member 15 and the inner surface 19 a of the lid 19. Δt is maintained. That is, the holding member 15 and the lid body 19 are spaced apart from each other so that a separation distance Δt is maintained between the back surface 14 b of the seed substrate and the inner surface 19 a of the lid body 19. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111334863-A |
| priorityDate | 2012-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.