http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014082329-A

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classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-308
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
filingDate 2012-10-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1f27db3b89732607c4750d8c334bdc6f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1b64b2258f32c178b4eb5ac2a181f342
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publicationDate 2014-05-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2014082329-A
titleOfInvention Composition
abstract A novel composition that can be used as an etching paste is provided. At least one etching component selected from trifluoromethanesulfonic acid, trifluoromethanesulfonic acid salt, and trifluoromethanesulfonic acid ester, and a substance that dissolves the etching component at 100 ° C. to 250 ° C. Composition. [Selection figure] None
priorityDate 2012-10-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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