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publicationDate 2014-04-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2014075459-A
titleOfInvention Semiconductor device
abstract A white LED light emitting diode that can increase green light emission and can be manufactured at low cost without using a sapphire substrate and a fluorescent agent is provided. An Si (100) substrate is anisotropically etched so that GaN is nonpolar, thereby forming a (110) plane and a (11-2) plane having different inclination angles. A SiC + AlN buffer layer 5 and n-type GaN epitaxial layers 7 and 8 are formed on this surface. As the light emitting layer, a quantum well layer film having a little influence of polarity or having a different In concentration depending on the crystal plane is obtained, and a red light emitting quantum multiple well layer 9 (a) is formed on the (100) plane of the planar region, and (( The green quantum multiple well layer 10 (d) is formed on the (110) plane, and the blue light emission quantum multiple well layer 10 (e) is formed on the (11-2) plane in the slope region. Further, p-type GaN layers 11 and 12 are formed. As a result, an efficient white diode can be obtained by forming the quantum well layer once. [Selection] Figure 20
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