http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014060250-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a665d61597c2731ab4130971ee397dc9 |
| classificationIPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 |
| filingDate | 2012-09-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c3672b16be9e01dfcbc6e20dbb5a76f5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7ac4a6179aefdc933f6088105a66f464 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9c7df139bb8b8a4400ab8cda5a63fb4a |
| publicationDate | 2014-04-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2014060250-A |
| titleOfInvention | Polishing composition |
| abstract | The present invention is suitable for polishing a polishing object having a metal wiring layer, suppresses a change in polishing performance over time, and has excellent storage stability including appearance changes such as discoloration and precipitation. A composition is provided. A polishing composition used for polishing a polishing object having a metal wiring layer, comprising a complexing agent, an anticorrosive agent, an anticorrosive agent decomposition inhibitor, and water, wherein the anticorrosive agent is decomposed. A polishing composition, wherein the inhibitor is at least one selected from the group consisting of charged amino acids. The anticorrosive agent decomposition inhibitor is preferably at least one selected from the group consisting of basic charged amino acids. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017066264-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2018159530-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018159530-A1 |
| priorityDate | 2012-09-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 303.