| abstract |
An object of the present invention is to easily identify sample fine particles adhering to an object to be inspected with high accuracy, improve the operating rate, and reduce the size of the apparatus. A compressed gas is blown from an air nozzle onto an inspection object transported to a sampling chamber defined by a pair of side walls and an upper wall surrounding a part of a transport path by a transport unit, and the separated sample fine particles are captured. The sample is sucked into the collector, and the sample particles are separated from the sucked gas and analyzed. The air nozzle is disposed on one side wall defining the sampling chamber, and the collector is disposed on the lower side of the other side wall as a container independent of the sampling chamber. [Selection] Figure 2 |