http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014041828-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_375e56c930a010a3edfedac830bb8bb1 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05G2-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2013-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_237c16dc7784f0b64e68311970c201bf http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_efc2e7fe80c864a9e8632e10a59cf577 |
| publicationDate | 2014-03-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2014041828-A |
| titleOfInvention | Extreme ultraviolet light generator |
| abstract | An extreme ultraviolet light source device capable of appropriately correcting the optical performance of laser light is provided. A guide laser beam having substantially the same optical axis and the same beam diameter as a driver pulse laser beam is introduced into an amplification system for amplifying a laser beam output from a driver laser oscillator. The The guide laser light is output as continuous light from the laser device 50 and introduced into the optical path of the driver pulse laser light via the guide laser light introduction mirror 52. The sensor 44 detects changes in the angle (direction) of the laser beam and the curvature of the wavefront. The wavefront correction controller 60 outputs a signal to the wavefront correction unit 34 based on the sensor measurement result. The wavefront correction unit 34 corrects the wavefront of the laser light to a predetermined wavefront in accordance with an instruction from the wavefront correction controller 60. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11228156-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180032485-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2016013550-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102563193-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7080236-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10172224-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020501188-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2022023906-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018179094-A1 |
| priorityDate | 2008-11-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 30.