http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014032392-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-023 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40 |
filingDate | 2013-06-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e75566e5be4a9ded4937b8988ae1ebc5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_644dc592a1857e788834137cfd38d763 |
publicationDate | 2014-02-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2014032392-A |
titleOfInvention | Photosensitive resin composition for glass processing and glass processing method |
abstract | Provided are a photosensitive resin composition for glass processing that has high etching resistance and excellent resolution, and has suppressed dripping, and a glass processing method using the photosensitive resin composition for glass processing. . A photosensitive resin composition for glass processing according to the present invention contains a resin having a hydroxyl group and a mass average molecular weight of 20000 or more, and a combination of a filler and a rheology modifier. The glass processing method according to the present invention includes a resin layer forming step of forming a resin layer made of the glass processing photosensitive resin composition on a glass substrate, an exposure step of selectively exposing the resin layer, and after exposure. A developing step of developing the resin layer to form a resin pattern, an etching step of etching the glass substrate using the resin pattern as a mask, and a peeling step of peeling the resin pattern. [Selection figure] None |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016212303-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016188922-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015172743-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016151583-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015169914-A |
priorityDate | 2012-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 496.