http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014025741-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9247ef0036b579e33f8ee2bdaa3c09c9 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-00 |
| filingDate | 2012-07-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cae569680cbe97b1e4352964736caff8 |
| publicationDate | 2014-02-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2014025741-A |
| titleOfInvention | Surface acoustic wave sensor for gas detection |
| abstract | A surface acoustic wave sensor for gas detection capable of ensuring good productivity while maintaining extremely high detection accuracy. A substrate including a surface having a circulation path in which a surface acoustic wave circulates a plurality of times and formed of a single crystal or a piezoelectric crystal material, and a surface acoustic wave is excited in the circulation path and excited by the circulation path. The surface acoustic wave element 14 includes a surface acoustic wave excitation / reception unit 12 that receives the generated surface acoustic wave, and a sensitive film 13 that is provided in at least a part of the circulation path and changes the elastic properties according to the gas in contact therewith. In the hydrogen gas sensor 10 having the above structure, the base 11 is formed of a first surface and a second surface that face each other, and a curved surface that is a third surface in contact with each of the first surface and the second surface. . [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11788474-B2 |
| priorityDate | 2012-07-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.