http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014010352-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
| filingDate | 2012-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_88bcabb3e0a0101711e37439a9856f96 |
| publicationDate | 2014-01-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2014010352-A |
| titleOfInvention | Actinic ray-sensitive or radiation-sensitive resin composition, and resist film, pattern forming method, electronic device manufacturing method, and electronic device using the composition |
| abstract | The present invention provides an actinic ray-sensitive or radiation-sensitive resin composition and a pattern forming method using the same, which can suppress the decrease in pattern film and improve the storage stability of a resist film. (A) At least one repeating unit having a partial structure represented by the following general formula (1) and a specific repeating unit decomposed by the action of an acid and has a solubility in an alkaline developer. An increasing resin, (B) an actinic ray-sensitive or radiation-sensitive resin composition containing a specific compound. In general formula (1), A represents a divalent linking group for bonding to the resin main chain structure. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017169746-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2017169746-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2017154545-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016153882-A |
| priorityDate | 2012-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 461.