abstract |
PROBLEM TO BE SOLVED: To form a patterned cured film having good adhesion to various substrates and developable with an alkaline aqueous solution, a method for producing a patterned cured film using the same, Provide electronic components. A photosensitive resin composition comprising (A) an alkali-soluble resin, (B) a compound that generates an acid by light, (C) a thermal crosslinking agent, and (D) an imidazolesilane compound. Applying and drying the photosensitive resin composition on a substrate to form a photosensitive resin film, exposing the photosensitive resin film, and developing the exposed photosensitive resin film with an alkaline aqueous solution. And the manufacturing method of a pattern cured film provided with the process of forming a pattern resin film, and the process of heating the said pattern resin film. [Selection] Figure 5 |