| abstract |
PROBLEM TO BE SOLVED: To provide a method capable of obtaining a sufficient aluminum ion beam dose in ion implantation using a vaporizer. SOLUTION: After AlF 3 (aluminum fluoride) is once vaporized and then heated again, AlF 3 solidified in the outlet region is led to the ionization chamber as vapor and then ionized, which is higher than conventional. It can be extracted as a sufficiently increased aluminum ion beam. When evaporating AlCl 3 (aluminum chloride), once evaporating and cooling, AlCl 3 can be led to the ionization chamber in a controllable state, and an aluminum ion beam is extracted. Is possible. [Selection] Figure 1 |