http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013540849-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3105 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31053 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate | 2011-09-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2013-11-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2013540849-A |
| titleOfInvention | Aqueous polishing composition and method for chemical mechanical polishing of a substrate comprising a silicon oxide dielectric film and a polysilicon film |
| abstract | (A) at least one type of positively charged abrasive particles that are proved from electrophoretic mobility when dispersed in an aqueous medium having a pH in the range of 3 to 9 that does not contain component (C); (B) at least one water-soluble or water-dispersible polymer selected from the group consisting of linear and branched alkylene oxide homopolymers and copolymers, and (C) at least one anionic phosphate dispersant, An aqueous polishing composition comprising, And a method of polishing a substrate material for an electric device, a mechanical device, and an optical device using the aqueous polishing composition. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017063190-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190102202-A |
| priorityDate | 2010-09-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 526.