http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013533614-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-7684 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-044 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 |
| filingDate | 2011-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2013-08-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2013533614-A |
| titleOfInvention | Chemical planarization of copper wafer polishing |
| abstract | The embodiments described herein relate to the removal of material from a substrate. More particularly, the embodiments described herein relate to polishing or planarizing a substrate by a chemical mechanical polishing process. In one embodiment, a method of chemical mechanical polishing (CMP) of a substrate is provided. The method includes a substrate having a conductive material layer formed thereon in a polishing solution that includes phosphoric acid, one or more chelating agents, one or more corrosion inhibitors, and one or more oxidizing agents. Exposing, forming a passivation layer over the conductive material layer, and causing a relative motion between the substrate and the polishing pad to remove at least a portion of the passivation layer to form an underlying conductive material layer And exposing a portion of the conductive material layer exposed by chemical dissolution. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2016017063-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016031971-A |
| priorityDate | 2010-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 69.