http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013528801-A

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filingDate 2011-05-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2013-07-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2013528801-A
titleOfInvention Pressure detection and flow control in diffusion bonded planar devices for fluid chromatography
abstract A flow-through pressure sensor for use in a fluid chromatography system includes a planar device formed from diffusion bonding of a plurality of metal sheets and at least one detection element. The planar device has a top surface, a bottom surface, and a flow-through channel. A diaphragm formed from a portion of one of the top or bottom surfaces is positioned adjacent to the detection region of the flow-through channel and is attached to the detection element. The diaphragm is sized to deviate a distance in response to fluid pressure in the detection region, which has an internal volume of less than about 25 microliters. The diaphragm and attached sensing element form a pressure sensor that measures the strain or deflection of the diaphragm to calculate the pressure in the sensing region.
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9841337-B2
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Total number of triples: 41.