http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013528476-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-005 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-265 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24355 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-0149 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31938 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31935 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00031 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-265 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D153-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D7-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82Y40-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82Y30-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D1-40 |
| filingDate | 2011-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2013-07-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2013528476-A |
| titleOfInvention | Surface treatment to align block copolymers |
| abstract | The present invention relates to a method of synthesizing and utilizing a randomly crosslinked substituted polystyrene copolymer as a polymer crosslinked surface treating agent (PXST) for controlling the orientation of physical features of a block copolymer deposited on a first copolymer. Such methods have many uses, including multiple applications in the semiconductor industry, including the production of templates for nanoimprint lithography. The present invention includes a) i) a crosslinkable polymer and ii) a block copolymer; b) coating a surface with the crosslinkable polymer to produce a first film; and c) a crosslinkable polymer comprising: Treating the first film under conditions such that it is crosslinked; d) coating the first film with the block copolymer to produce a second film; and e) producing a nanostructure. And processing the second film under such conditions. |
| priorityDate | 2010-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 48.