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filingDate 2011-04-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2013-06-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2013525252-A
titleOfInvention Method for depositing niobium-doped titania film on substrate and coated substrate produced thereby
abstract The coated article includes a transparent, conductive oxide film made of niobium-doped titanium oxide and deposited by pyrolysis. This article is made by using a coating mixture having a niobium precursor and a titanium precursor. The coating mixture is directed toward the heated substrate, the coating mixture is decomposed, and a transparent and conductive niobium-doped titanium oxide film is deposited on the heated substrate surface. In one embodiment of the present invention, the method is carried out using a vaporized coating mixture comprising vaporized niobium precursor, vaporized titanium precursor and carrier gas, with a sheet resistance value greater than 1.2 and 2.3 or greater. A niobium-doped titanium oxide film having a refractive index of 5 is deposited. The chemical formula of titanium oxide doped with niobium is Nb: TiO X (X is in the range of 1.8 to 2.1).
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