http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013525252-A
Outgoing Links
Predicate | Object |
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classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2217-212 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2217-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2218-152 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2218-112 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2217-94 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2217-218 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C17-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C17-245 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C17-2456 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C17-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C17-3417 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C17-256 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C17-25 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C17-002 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C17-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C17-245 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40 |
filingDate | 2011-04-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2013-06-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2013525252-A |
titleOfInvention | Method for depositing niobium-doped titania film on substrate and coated substrate produced thereby |
abstract | The coated article includes a transparent, conductive oxide film made of niobium-doped titanium oxide and deposited by pyrolysis. This article is made by using a coating mixture having a niobium precursor and a titanium precursor. The coating mixture is directed toward the heated substrate, the coating mixture is decomposed, and a transparent and conductive niobium-doped titanium oxide film is deposited on the heated substrate surface. In one embodiment of the present invention, the method is carried out using a vaporized coating mixture comprising vaporized niobium precursor, vaporized titanium precursor and carrier gas, with a sheet resistance value greater than 1.2 and 2.3 or greater. A niobium-doped titanium oxide film having a refractive index of 5 is deposited. The chemical formula of titanium oxide doped with niobium is Nb: TiO X (X is in the range of 1.8 to 2.1). |
priorityDate | 2010-04-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 74.