| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-386
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2201-0394
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K1-0306 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76898
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-15
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-486
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-49827
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-48 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K1-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-40 |
| filingDate |
2011-04-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2013-06-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2013524534-A |
| titleOfInvention |
Selective patterning for low cost through vias |
| abstract |
The blocking layer deposited on the substrate prior to the deposition of the metal lines and the etching of the through via allows for low cost manufacturing in the through via of the substrate using an isotropic etching process. For example, by using wet etching of a glass substrate, a through glass via without an undercut by wet etching that short-circuits a metal wire on the glass substrate can be manufactured. The block layer prevents contact between the conductive layer covering the through via and two or more metal lines on the substrate. This manufacturing process makes it possible to stack devices on a substrate such as a glass substrate and to connect the devices using through vias. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2023080375-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017209296-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-6323768-B1 |
| priorityDate |
2010-04-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |