http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013518740-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0274 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11B5-84 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C59-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2010-02-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2013-05-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2013518740-A |
| titleOfInvention | Methods and processes for metal stamp replication for large area nanopatterns |
| abstract | A method and process for obtaining a metal stamp from an intermediate polymer stamp comprising: providing a first imprint layer on a top surface of the first polymer layer; and imprinting the structure to obtain an intermediate stamp. If the imprinted polymer is non-conductive, an electrically conductive layer is provided on the top surface of the structure to obtain a seed layer, and metal is plated on the top surface of the intermediate polymer stamp to obtain a metal stamp. The intermediate stamp is then separated from the metal stamp. |
| priorityDate | 2010-02-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 27.