http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013505583-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2875 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate | 2010-09-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2013-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2013505583-A |
| titleOfInvention | Inline characterization |
| abstract | An apparatus for inline characterization is provided. The apparatus includes a device to be tested, to which a first voltage and a second voltage are sequentially applied, and a device in which the first voltage and the second voltage are sequentially applied. And a local heating element that applies the first temperature and the second temperature substantially simultaneously to the device under test, and a temperature sensing unit that measures the temperature of the device under test. [Selection] Figure 6 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2015137023-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015137023-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10161990-B2 |
| priorityDate | 2009-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 17.