Predicate |
Object |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E10-549 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K30-87 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0388 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2012 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D5-32 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D201-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09B67-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D5-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D201-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D7-12 |
filingDate |
2010-08-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate |
2013-01-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
JP-2013502488-A |
titleOfInvention |
Near-infrared absorbing film composition |
abstract |
A near-infrared absorbing film composition is provided. A curable composition comprising (i) one or more near infrared absorbing polymethine dyes, (ii) one or more crosslinkable polymers, and (iii) one or more cast solvents. A composition is provided. The present invention is also directed to a solid near-infrared absorbing film comprising a crosslinked form of the curable composition. The invention further includes a microelectronic substrate comprising a coating of a solid near-infrared absorbing film, and coated on the microelectronic substrate when the near-infrared absorbing film is between the microelectronic substrate and the photoresist film. Also contemplated is a method of patterning a photoresist layer. [Selection] Figure 1 |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011197425-A |
priorityDate |
2009-08-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |