http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013501958-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0047 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-425 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0274 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-42 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2010-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2013-01-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2013501958-A |
| titleOfInvention | Resist stripping composition and resist stripping method using the same |
| abstract | Resist stripping solution excellent in resist pattern and dry and wet etching residue removal ability, not only excellent in corrosion prevention of metal wiring containing aluminum and / or copper, but also increased in the number of substrates processed and economical A composition and a resist stripping method using the composition are provided. The present invention relates to a resist stripping composition and a resist stripping method using the same. The resist stripping solution composition is excellent in resist pattern and dry and wet etching residue removing power, and contains a specific polyol compound, and thus has excellent corrosion resistance of metal wiring containing aluminum and / or copper. In addition, since a specific amide compound is included, a large number of substrates can be processed, which greatly contributes to cost reduction. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019532483-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11279905-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102529951-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016500159-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108139693-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20170070871-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018135290-A1 |
| priorityDate | 2009-08-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 234.