http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013243261-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1af8df51ce24ca931ae718fb747f6aa0 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-146 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-324 |
| filingDate | 2012-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_da669bb2366dee38246b3951f753b5d5 |
| publicationDate | 2013-12-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2013243261-A |
| titleOfInvention | Method for manufacturing solid-state imaging device |
| abstract | A technique advantageous in reducing interface traps in a MOS structure is provided. A method of manufacturing a solid-state imaging device includes a first step of forming a member having an insulating film on a semiconductor substrate, and heat-treating the member in an atmosphere containing deuterium after the first step. A second step and a third step including a cooling step for cooling the member in an atmosphere in which deuterium is present after the second step. In the cooling step in the third step, the member is It is characterized by cooling to a temperature not lower than room temperature and not higher than 250 ° C. [Selection] Figure 1 |
| priorityDate | 2012-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 17.