http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013243174-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2221-68304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6835 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68785 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 |
filingDate | 2012-05-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e96599b47368b0d64e71ba01f8b89c69 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dece5af2e2ef88d8f125fe9e71bbcaf2 |
publicationDate | 2013-12-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2013243174-A |
titleOfInvention | Support |
abstract | A support capable of avoiding the possibility of bumps formed on a substrate being damaged by the support in a state where the adhesive layer is dissolved and the support can be peeled off from the substrate. provide. A support plate has four or more through holes that penetrate in the thickness direction, and the through holes are arranged regularly on the entire surface of the support plate. A part of the through holes are closed to form a plurality of non-penetrating portions 11, and the non-penetrating portions 11, 11 are regularly arranged on the entire surface of the support plate 2. [Selection] Figure 1 |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113380614-A |
priorityDate | 2012-05-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 205.