| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40 |
| filingDate |
2012-04-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3819fea49b4ed518c3e8d34f44c8a159
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_368f3adf309874820f1cd2166e6641b4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_93c73d832f83b05a2bba1832f671c118 |
| publicationDate |
2013-11-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2013229511-A |
| titleOfInvention |
Method for forming a pattern in which two or more isolated holes are arranged side by side |
| abstract |
A method for forming a pattern is provided. [Solution] A resin composition is applied to a substrate having a thin film having a connection hole pattern formed by connecting two or more virtual holes on its surface so as to cover the bottom surface and side walls of the recesses of the connection hole pattern. A step of forming a fluorinated film, a step of forming a layer containing a block copolymer in which a plurality of types of blocks are bonded on the substrate on which the neutralized film is formed, and a step of phase-separating the layer containing the block copolymer And selectively removing a phase composed of at least one of a plurality of types of blocks constituting the block copolymer from the layer including the block copolymer, and a plurality of isolated layers inside the connection hole pattern. And a step of forming a hole pattern. A method of forming a pattern comprising two or more isolated holes arranged side by side. [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015115599-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2016043005-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014062990-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9846364-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20160112976-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7044976-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2016043005-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10429740-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015106639-A |
| priorityDate |
2012-04-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |