http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013221911-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73ebc284a55d5daf0e209d6186c9e65c |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate | 2012-04-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_709db282678e832ccb324b0086527891 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_08ce61b627f4a4cb3019d7a4d4c9a8f1 |
| publicationDate | 2013-10-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2013221911-A |
| titleOfInvention | Handler and parts inspection device |
| abstract | [PROBLEMS] To switch the temperature of a support part supporting a part between a low temperature that is lower than normal temperature, a normal temperature and a high temperature that is higher than normal temperature, and the support part from a low temperature to a high temperature. Provided is a handler capable of shortening the time required for switching, and a component inspection apparatus including the handler. A handler includes a first flow path 57 through which nitrogen gas for cooling a storage pocket 17A flows, a second flow path 87A through which a normal temperature return gas for returning to room temperature flows, and a third flow path 92 through which temperature rising air for raising the temperature flows. Have The first and second flow paths 57 and 87A are connected in parallel to the medium supply path 61, and the medium supply path 61 and the third flow path 92 are connected in parallel to the temperature adjustment flow path 71A. During the cooling operation, the valve 59 is open and the valves 89, 94 are closed, during the normal temperature recovery operation, the valve 89 is open and the valves 59, 94 are closed, and during the high temperature switching operation, the valves 59, 89 are closed and the valve 94 is Controlled to open state. [Selection] Figure 2 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021372695-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11761704-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-4060721-A4 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2023084612-A1 |
| priorityDate | 2012-04-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419556970 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID947 |
Total number of triples: 17.