http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013209558-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9317c0cce712dbf1a1a2252d652451f9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c1755eede76ea7e719a3e0d2843cd793 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B13-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01G23-053 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01G23-04 |
| filingDate | 2012-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aff7ec0edd1248648f99a198201df516 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b9f412cfd7ed0980a3f2b1c0c07e2c1e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b6f277b26fce0c93a5122a377f0b6483 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_01c671a9410ab832338e5819f0f4db27 |
| publicationDate | 2013-10-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2013209558-A |
| titleOfInvention | Thin film formation method |
| abstract | To provide a thin film forming method capable of forming a thin film having a high altitude without performing high-temperature firing. A coating liquid containing metal oxide particles and peroxotitanic acid is coated on a substrate to form a coating film, and the coating film is subjected to plasma treatment, ultraviolet light irradiation treatment, and visible light irradiation treatment. A method of forming a thin film, comprising performing at least one treatment selected from the group consisting of: The metal oxide particles are preferably one or more particles selected from the group consisting of titanium oxide, tungsten oxide, zinc oxide, tin oxide, hafnium oxide, zirconium oxide, and niobium oxide. The plasma treatment is preferably an atmospheric pressure plasma treatment or a low vacuum plasma treatment. [Selection] Figure 1 |
| priorityDate | 2012-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 61.