| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5157cc9d29989d27bd65a85902ddb054 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-2316 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-2366
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-036
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-225 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-23 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-131
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-134
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-036
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-225
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-223 |
| filingDate |
2013-04-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3e9224351d2d7e97dff19c6e4631d342
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_72cc477003e8618877e6a7970cd35c4d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_55bc2f27172b4e2f69d26c5ac7250841
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f1d7220fb92613662898381f8ccff9b8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fd74e59dffd4eba88ec96ffbf5dc5a4a |
| publicationDate |
2013-10-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2013201433-A |
| titleOfInvention |
Fluorine injection control of multi-chamber excimer or molecular fluorine gas discharge laser |
| abstract |
A multi-chamber excimer or molecular fluorine gas discharge laser system is provided that is amplified in a master oscillator power amplifier (MOPA) configuration fluorine injection controller and method. Based on a difference between a first operating parameter of one of the oscillating chamber and the amplifying chamber and a second operating parameter of the one oscillating chamber and the amplifying chamber, in one of the oscillating chamber and the one amplifying chamber. Estimating the amount of halogen gas consumed and estimating the amount of halogen gas consumed in the other of the oscillation chamber and amplification chamber based on the third operating parameter of the other of the oscillation chamber and amplification chamber, Determining the amount of halogen gas injection to the oscillation chamber and the amplification chamber based on a halogen gas consumption estimator representing the amount, and an estimated fluorine consumption output from the fluorine consumption estimator and a cost function including multiple weighted injection decision determinations A halogen gas injection controller. [Selection] Figure 3 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10892594-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019190229-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017237224-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10218147-B2 |
| priorityDate |
2004-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |