| abstract |
An electromechanical conversion element capable of improving withstand voltage is provided. The electromechanical conversion element is an electromechanical conversion element that converts an electric signal into a mechanical displacement or converts a mechanical displacement into an electric signal, and includes an alumina film, a metal film, and a conductive oxide. A lower electrode in which films are sequentially stacked, an electromechanical conversion film disposed on the conductive oxide film of the lower electrode, and an upper electrode disposed on the electromechanical conversion film, The metal film is a film having no voids. [Selection] Figure 1 |