http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013184064-A

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filingDate 2013-03-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_30e11519ae14da604858fdba241d6452
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publicationDate 2013-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2013184064-A
titleOfInvention Method of manufacturing an ultrasonic transducer used in an ultrasonic imaging device, and an ultrasonic transducer and an ultrasonic probe manufactured by the method
abstract An improved method of manufacturing an ultrasonic transducer having limited dimensions without reducing imaging resolution. Providing a carrier of semiconductor material comprising a two-dimensional array of conductor pads and an electrical circuit connected to the conductor pads for further processing outside the ultrasonic transducer. Next, a layer comprising piezoelectric material is provided on the carrier, which layer covers a two-dimensional array of conductor pads. Each of the plurality of transducer elements is separated by dicing the two-dimensional array on the carrier. Finally, a ground layer is provided on the plurality of transducer elements to ground each transducer element. Here, a buffer layer is provided between the carrier and the layer comprising the piezoelectric material. The buffer layer has a thickness suitable for dicing each of the plurality of transducer elements on the carrier. [Selection] Figure 1
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