| abstract |
Provided is a small component analyzer that can perform component analysis in a non-contact manner on a test object and has good portability. A component analyzing apparatus includes a housing, a light source, a light incident unit that guides light from the inspection object to the inside of the housing, and a wavelength variable that extracts light having a predetermined wavelength from the incident light. An interference filter 5, an imaging unit 133 that receives the extracted light and captures a spectral image, a control unit 17 that performs component analysis of the inspection object based on the spectral image, and a display 15 that displays a component analysis result; The light incident part 131, the imaging part 133, and the control part 17 are provided in the housing 11, and the wavelength variable interference filter 5 is opposed to the fixed substrate having the fixed reflective film and the fixed substrate. And a movable substrate having a movable reflective film disposed and facing the fixed reflective film via the gap between the reflective films, and an electrostatic actuator for changing a gap amount of the gap between the reflective films. [Selection] Figure 3 |