http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013167474-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73ebc284a55d5daf0e209d6186c9e65c |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate | 2012-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_709db282678e832ccb324b0086527891 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_08ce61b627f4a4cb3019d7a4d4c9a8f1 |
| publicationDate | 2013-08-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2013167474-A |
| titleOfInvention | Handler and parts inspection device |
| abstract | A handler having a cooling mechanism capable of local cooling, and a component inspection apparatus including the handler. A handler includes a low-temperature nitrogen heat exchanger 51 that cools compressed air with low-temperature nitrogen gas, a stage 15 that is supplied with compressed air cooled by the low-temperature nitrogen heat exchanger 51, and a heater that heats the stage 15 53, a temperature sensor 54 that detects the temperature of the stage 15, and a valve 52 that opens and closes a supply path for supplying low-temperature nitrogen gas to the low-temperature nitrogen heat exchanger 51. Further, the handler controls the output of the heater 53 and the opening / closing of the valve 52 so that the detected temperature of the temperature sensor 54 becomes a predetermined temperature by the control unit. [Selection] Figure 2 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105980869-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102103086-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2015083239-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11761704-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102058008-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015083241-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20210149598-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2015083241-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190062233-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021372695-A1 |
| priorityDate | 2012-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419556970 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID947 |
Total number of triples: 23.