http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013162078-A

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filingDate 2012-02-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_08ea018991cae2563e6590834328f2e2
publicationDate 2013-08-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2013162078-A
titleOfInvention Nitride semiconductor device including heterojunction and manufacturing method thereof
abstract There is provided a nitride semiconductor device having an increased withstand voltage and a reduced leakage current. A nitride semiconductor device includes an Al x Ga 1-x N layer (3) and an Al y Ga 1-y N layer (0 ≦ x <y ≦ 1) sequentially stacked on a buffer layer (2). (4) and the Al y Ga 1-y N layer (4) so as to individually cover the plurality of threading dislocations (PD) appearing on the upper surface of the Al y Ga 1-y N layer (4). It further includes a plurality of local GaN layer portions (5) formed thereon. [Selection] Figure 4
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110600536-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015079800-A
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