http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013161933-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_063a1b324005ddc15e16e7529c6258c4 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-105 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L49-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L45-00 |
| filingDate | 2012-02-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_042f52d51e387d9ba41f83b486d96e45 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5dcd814bfe6bf14d5d43c1dcc94b5898 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_225995447af4fb247ef7133798d3e130 |
| publicationDate | 2013-08-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2013161933-A |
| titleOfInvention | Nonvolatile memory element and manufacturing method thereof |
| abstract | A variable resistance nonvolatile memory element capable of reducing an initial breakdown voltage and suppressing variations in the initial breakdown voltage, and a method for manufacturing the same. A method for manufacturing a nonvolatile memory element according to the present invention includes a step of forming a lower electrode 105 ″ on a substrate, and a first resistance change layer 106a composed of a transition metal oxide on the lower electrode 105 ″. Forming the insulating layer 112 ′ by covering the first variable resistance layer 106 a ′, forming the through hole 130 in the insulating layer 112 ′, and the first exposed in the through hole 130. A step of selectively oxidizing the resistance change layer 106a ′ to form an oxide film and forming a second resistance change layer 106b composed of the oxide film; and an upper electrode 107 on the second resistance change layer 106b. Forming a '. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112310040-A |
| priorityDate | 2012-02-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.