http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013157579-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a665d61597c2731ab4130971ee397dc9 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 |
filingDate | 2012-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bfad1fdfef6126bcbec463e5b8ae370c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_11147c4bacf2b61803909e1762156a7e |
publicationDate | 2013-08-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2013157579-A |
titleOfInvention | Polishing composition |
abstract | Disclosed is a polishing composition that can be suitably used for polishing a polishing object having a phase change alloy. In particular, a polishing composition capable of obtaining a high polishing rate is provided. The polishing composition of the present invention is a polishing composition used for polishing a polishing object having a phase change alloy, and is at least one selected from a compound having abrasive grains and a sulfo group. A polishing composition comprising the additive as described above. The abrasive grains are preferably colloidal silica. [Selection figure] None |
priorityDate | 2012-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 188.