http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013152169-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e5db580deca7130dbe51805c6c608b35 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-64 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-62 |
| filingDate | 2012-01-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4140c000a3496269b57e6f4ff105b21d |
| publicationDate | 2013-08-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2013152169-A |
| titleOfInvention | Secondary ion mass spectrometry method and secondary ion mass spectrometer |
| abstract | PROBLEM TO BE SOLVED: To provide a secondary ion mass spectrometry technique capable of accurately performing an element distribution measurement in a depth direction even for a sample having an outermost surface that is easily affected by oxidation or the like. [Solution] The present invention includes a step of comparing a first spectrum indicating a sample voltage dependency of a count number of secondary ions generated from the outermost surface of the sample during primary ion irradiation with a second spectrum generated from an unoxidized portion of the sample. And obtaining a sample voltage corresponding to a spectrum region having no oxygen enhancement effect from the first and second spectra, and measuring an element distribution in the depth direction of the sample at the sample voltage. The present invention relates to a secondary ion mass spectrometry method. [Selection] Figure 3 |
| priorityDate | 2012-01-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 15.