| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_669c01133740c5233f2c8738904ea3af |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-54 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-32 |
| filingDate |
2012-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_670728824132ce71b207aa72751eca6b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2644ad07440e9affc58ea0d231c559b7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a0470ae0c75e7cd9d7e20a0595d13ead |
| publicationDate |
2013-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2013148892-A |
| titleOfInvention |
Large phase shift mask and manufacturing method of large phase shift mask |
| abstract |
The present invention provides a translucent phase shift mask suitable for forming a fine pattern in a large photomask used for manufacturing a liquid crystal panel or an EL panel, and a method for manufacturing the same. Furthermore, the structure which suppresses generation | occurrence | production of the side peak which arises when a pattern is exposed using a translucent phase shift mask is provided. In a pattern in which transmission regions are adjacently disposed on both sides of a semitransparent phase shift region formed on a transparent substrate, the light transmittance of the semitransparent phase shift region is in the range of 4% to 30%. The width is in the range of 1 μm to 5 μm, thereby improving the contrast of the exposure intensity distribution and suppressing the occurrence of side peaks. [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20170117988-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104656366-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015099245-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10474034-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016071059-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9989857-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200120599-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019012280-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20160010322-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200132813-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20170117987-A |
| priorityDate |
2011-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |