| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4d72711e97d894c55af805c9de2053ab |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D493-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-028
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-027 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
| filingDate |
2012-12-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0a88a7e02144b44ad59cdd89e68c838b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_802d961e267cab2ff5c3f5972b78b315
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ed9e763bfda0d7a815e8950d866b17a6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b8c9210786f0001cd1c0989145355766 |
| publicationDate |
2013-07-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2013140352-A |
| titleOfInvention |
Photoacid generator and photoresist containing the same |
| abstract |
Provided is a photoacid generator that simultaneously achieves low diffusivity and good defect level. A photoacid generator represented by formula (I). [In the formula (I), G + represents an onium salt of the formula (II)] [In the formula (II), X is S or I. ] [Selection figure] None |
| priorityDate |
2011-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |